Dry etching for VLSI

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Title:

Dry etching for VLSI

Personal Author:

Roosmalen, A. J. Van

Publication Information:

New York : Plenum Pr., 1991

ISBN:

9780306438356

Subject Term:

Semiconductors -- Etching

Integrated circuits -- Very large scale integration -- Design and construction

Added Author:

Baggerman, J. A. G.

Brader, S. J. H.

Available:*

Library	Item Barcode	Call Number	Material Type	Item Category 1	Status
Searching... PSZ JB	30000000228001	TK7871.85.R58 1991	Open Access Book	Book	Searching... Unknown
Searching... PSZ KL	30000000228035	TK7871.85.R58 1991	Open Access Book	Book	Searching... Unknown

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