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Cover image for Effect of substrate temperature on the properties of diamond-like carbon deposited by PECVD in methane atmosphere
Title:
Effect of substrate temperature on the properties of diamond-like carbon deposited by PECVD in methane atmosphere
Series:
Siri kertas kerja penyelidikan (Universiti Teknologi Malaysia. Pusat Pengurusan Penyelidikan); vot 74542
Publication Information:
Skudai : Universiti Teknologi Malaysia, 2006
Subject Term:

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30000010146687 TP873.5.D5 E43 2006 Non Circulating UTM Special Collection Materials 1:BOOK_ARC
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30000010146688 TP873.5.D5 E43 2006 Open Access Book Proceedings, Conference, Workshop etc.
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30000010146689 TP873.5.D5 E43 2006 Open Access Book Book
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