Nickel phosphorus coated substrate micro-defect reduction through chemical mechanical planarization process optimization

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Title:

Nickel phosphorus coated substrate micro-defect reduction through chemical mechanical planarization process optimization

Personal Author:

Nazim Mohd. Saleh, 1978-, uthor

Publication Information:

2014

Physical Description:

xv, 73 p. : ill. (some col.) ; 30 cm.

General Note:

Also available in CD-ROM : CP 053244 ra

Supervisor : Dr. Jafri Mohd. Rohani

Subject Term:

Added Author:

Jafri Mohd. Rohani, 1966-,

Added Corporate Author:

Fakulti Kejuruteraan Mekanikal

DSP_DISSERTATION:

Thesis (Sarjana Kejuruteraan (Kejuruteraan Industri)) - Universiti Teknologi Malaysia, 2014

Available:*

Library	Item Barcode	Call Number	Material Type	Item Category 1	Status
Searching... FKM Library	32000000000882	TP245.P5 N39 2014 raf	Closed Access Thesis	UTM Master Thesis (Closed Access)	Searching... Unknown
Searching... Perpustakaan Raja Zarith Sofiah	35000000014468	TP245.P5 N39 2014 raf	Closed Access Thesis	UTM Master Thesis (Closed Access)	Searching... Unknown

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