Title:
Optical lithography : here is why
Personal Author:
Publication Information:
Washington, WA : SPIE Publications, 2010
Physical Description:
xiv, 477 p. : ill. ; 27 cm.
ISBN:
9780819475602
Available:*
Library | Item Barcode | Call Number | Material Type | Item Category 1 | Status |
|---|---|---|---|---|---|
Searching... | 30000010219421 | TK7872.M3 L56 2010 | Open Access Book | Book | Searching... |
