Cover image for Silicon science and advanced micro-device engineering I : selected, peer reviewed papers from the 5th International Symposium on Silicon Science and the 1st International Conference on Advanced Micro-Device Engineering (ISSS & AMDE 2009), was held by the International Education and Research Center for Silicon Science and the Advanced Technology Research Center (ATEC), Gunma University on 10 and 11 December 2009 in Kiryu, Japan
Title:
Silicon science and advanced micro-device engineering I : selected, peer reviewed papers from the 5th International Symposium on Silicon Science and the 1st International Conference on Advanced Micro-Device Engineering (ISSS & AMDE 2009), was held by the International Education and Research Center for Silicon Science and the Advanced Technology Research Center (ATEC), Gunma University on 10 and 11 December 2009 in Kiryu, Japan
Conference Author:
International Symposium on Silicon Science (5th : 2009 : Kiryu-shi, Japan)
Series:
Key engineering materials ; 459
Publication Information:
Stafa-Zurich ; Enfield, N.H. : Trans Tech Publications, c2011
Physical Description:
xii, 282 p. : ill. ; 25 cm.
ISBN:
9780878492176
Subject Term:
Silicon -- Congresses

Nanostructures -- Congresses

Microelectronics -- Congresses
Added Author:
Hanaizumi, Osamu

Unno, Masafumi
Added Corporate Author:
Gunma Daigaku. International Education and Research Center for Silicon Science

Gunma Daigaku. Advanced Technology Research Center
Added Conference Author:
International Conference on Advanced Micro-Device Engineering (1st : 2009 : Kiryu-shi, Japan)

Available:*

Library
Item Barcode
Call Number
Material Type
Item Category 1
Status
Searching...
 30000010283075 TK7871.15.S55 I584 2009 Open Access Book Book
Searching...

On Order