Title:
Microelectronic applications of chemical mechanical planarization
Publication Information:
Hoboken, NJ : John Wiley & Sons, 2008
ISBN:
978047171919 (hbk.)
Added Author:
Available:*
Library | Item Barcode | Call Number | Material Type | Item Category 1 | Status |
---|---|---|---|---|---|
Searching... | 30000010134042 | TK7874 M525 2007 | Open Access Book | Book | Searching... |