Cover image for Instrumentation, metrology, and standards for nanomanufacturing II : 10 August 2008, San Diego, California, USA
Title:
Instrumentation, metrology, and standards for nanomanufacturing II : 10 August 2008, San Diego, California, USA
Series:
Proceedings of SPIE--the International Society for Optical Engineering ; v. 7042
Publication Information:
Washington : SPIE, 2008
Physical Description:
1 v. (various pagings) : ill. ; 28 cm.
ISBN:
9780819472625

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30000010215762 TA418.9.N35 I57 2008 Open Access Book Book
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