Microelectromechanical systems--materials and devices IV : symposium held November 29-December 3, [2010], Boston, Massachusetts, U.S.A.

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Materials Research Society symposium proceedings, v. 1299

Materials Research Society symposia proceedings ; v. 1299.

Publication Information:

Warrendale, Pa. : Materials Research Society ; New York, NY : Cambridge University Press, 2011.

Physical Description:

ix, 207 p. : ill. ; 24 cm.

ISBN:

9781605112763

General Note:

Papers presented at Symposium S, "Microelectromechanical Systems--Materials and Devices IV," held at the 2010 MRS Fall Meeting in Boston, Mass.

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Library	Item Barcode	Call Number	Material Type	Item Category 1	Status
Searching... PSZ JB	30000010321261	TK7875 S968 2010	Open Access Book	Book	Searching... Unknown