Cover image for Polymers for microelectronics : resists and dielectrics
Title:
Polymers for microelectronics : resists and dielectrics
Series:
ACS symposium series; 537
Publication Information:
Washington, DC : American Chemical Society, 1994
ISBN:
9780841227217
General Note:
Development from a symposium sponsored by the Division of Polymeric Materials : Science and Engineering, inc, of the American Chemical Society, San Francisco, California, April 5-10, 1992
Subject Term:
Microelectronics -- Materials -- Congresses

Polymers -- Congresses
Added Author:
Thompson, L. F., 1944-

Willson, C. G. (C. Grant), 1939-

Tagawa, Seiichi
Added Corporate Author:
American Chemical Society. Division of Polymeric Materials : Science and Engineering
Added Conference Author:
American Chemical Society Meeting (203rd : 1992 : San Francisco, Calif)

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 30000003052457 TK7871.15.P6 P64 1994 Open Access Book Proceedings, Conference, Workshop etc.
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