Optical micro- and nanometrology in microsystems technology : 5-7 April 2006, Strasbourg, France

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Series:

Proceedings of SPIE ; 6188

Publication Information:

Bellingham, WA : SPIE Press, 2006

Physical Description:

lxiv, various pagings. : ill. ; 28 cm.

ISBN:

9780819462442

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Library	Item Barcode	Call Number	Material Type	Item Category 1	Status
Searching... PSZ JB	30000010200295	TA1505 O67 2006	Open Access Book	Book	Searching... Unknown