Cover image for Statistical case studies for industrial process improvement
Title:
Statistical case studies for industrial process improvement
Personal Author:
Series:
ASA-SIAM series on statistics and applied probability.
Publication Information:
Philadelphia, Pa. : Society for Industrial and Applied Mathematics ; Alexandria, Va. : American Statistical Association, c1997.
Physical Description:
xxvii, 514 p. : ill. ; 26 cm.
ISBN:
9780898713947
General Note:
Mac disk destroyed.
Abstract:
Accompanying disk contains case studies of several statistical methods.
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30000010321054 TS156.8 C95 1997 Open Access Book Book
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Summary

Summary

American industry is becoming more aware of the importance of applying statistical methods to improve its competitive edge in the world market. Examples of real industrial applications can serve as a major motivator for industries that want to increase their use of statistical methods.

This book contains a broad selection of case studies written by professionals in the semiconductor industry that illustrate the use of statistical methods to improve manufacturing processes. These case studies offer engineers, scientists, technicians, and managers numerous examples of best-in-class practices by their peers. Because of the universal nature of statistical applications, the methods described here can be applied to a wide range of industries, including the chemical, biotechnology, automotive, steel, plastics, textile, and food industries. Many industries already benefit from the use of statistical methods, although the semiconductor industry is considered both a leader in and a model for the wide application and effective use of statistics.

Specific case studies address the following statistical methods: gauge studies, passive data collection (sources of variation studies), design of experiments, statistical process control, and equipment reliability.

Readers familiar with the statistical methodologies that comprise the Six Sigma® tool box will find a wealth of applications. Czitrom has written an introduction to each statistical method, which, along with a glossary, gives basic definitions of frequently occurring statistical terms and suggestions for further reading. The case studies, which can be used in industrial training as well as in academia, are an extremely useful classroom supplement and will remain a rich source of used and useful approaches to real industrial problems for years to come.


Table of Contents

Foreword
Preface
Acknowledgments
Introduction
Facts About SEMATECH
Sematech Qualification Plan
Part 1 Gauge Studies
Chapter 1 Introduction to Gauge Studies
Chapter 2 Prometrix RS35e Gauge Study in Five Two-Level Factors and One Three-Level Factor
Chapter 3 Calibration of an FTIR Spectrometer for Measuring Carbon
Chapter 4 Revelation of a Microbalance Warm-Up Effect
Chapter 5 GRR Methodology for Destructive Testing and Quantitative Assessment of Gauge Capability For One-Side Specifications
Part 2 Passive Data Collection
Chapter 6 Introduction to Passive Data Collection
Chapter 7 Understanding the Nature of Variability in a Dry Etch Process
Chapter 8 Virgin Versus Recycled Wafers for Furnace Qualification: Is the Expense Justified?
Chapter 9 Identifying Sources of Variation in a Wafer Planarization Process
Chapter 10 Factors Which Affect the Number of Aerosol Particles Released by Clean Room Operators
Chapter 11 A Skip-Lot Sampling Plan Based on Variance Components for Photolithographic Registration Measurements
Chapter 12 Sampling to Meet a Variance Specification: Clean Room Qualification
Chapter 13 Snapshot: A Plot Showing Progress Through a Device Development Laboratory
Part 3 Design of Experiments
Chapter 14 Introduction To Design Of Experiments
Chapter 15 Elimination of TiN Peeling During Exposure to CVD Tungsten Deposition Process Using Designed Experiments
Chapter 16 Modeling a Uniformity Bulls-Eye Inversion
Chapter 17 Using Fewer Wafers to Resolve Confounding in Screening Experiments
Chapter 18 Planarization by Chemical Mechanical Polishing: A Rate and Uniformity Study
Chapter 19 Use of Experimental Design to Optimize a Process for Etching Polycrystalline Silicon Gates
Chapter 20 Optimization of a Wafer Stepper Alignment System Using Robust Design
Chapter 21 Application of Semi-Empirical Model Building to the RTCVD of Polysilicon
Part 4 Statistical Process Control
Chapter 22 Introduction to Statistical Process Control
Chapter 23 Removing Drift Effects When Calculating Control Limits
Chapter 24 Implementation of a Statistical Process Control Capability Strategy in the Manufacture of Raw Printed Circuit Boards for Surface Mount Technology
Chapter 25 Obtaining and Using Statistical Process Control Limits in the Semiconductor Industry
Part 5 Equipment Reliability
Chapter 26 Introduction to Equipment Reliability
Chapter 27 Marathon Report for a Photolithography Exposure Tool
Chapter 28 Experimentation for Equipment Reliability Improvement
Chapter 29 How to Determine Component-Based Preventive Maintenance Plans
Part 6 Comprehensive Case Study
Chapter 30 Introduction to Comprehensive Case Study
Chapter 31 Characterization of a Vertical Furnace Chemical Vapor Deposition (CVD) Silicon Nitride Process
Appendix: Introduction to Integrated Circuit Manufacturing
Glossary of Selected Statistical Terms
Index of Selected Statistical Terms