Title:
Physical and technical problems of SOI structures and devices
Series:
NATO Advanced Science Institute Series. Partnership sub-series, high technology; v.4
Publication Information:
Dordrecht : Kluwer Academic Publishers, 1995
ISBN:
9780792336006
General Note:
Proceedings of the NATO Advanced Research Workshop on Physical and Technical Problems of SOI Structures and Devices, Gurzuf, Ukraine, November 1-4, 1994
Available:*
Library | Item Barcode | Call Number | Material Type | Item Category 1 | Status |
|---|---|---|---|---|---|
Searching... | 30000003215005 | TK7871.85.P49 1995 | Open Access Book | Proceedings, Conference, Workshop etc. | Searching... |
On Order
Summary
Summary
In this text, specialists in silicon-on-insulator technology from both East and West meet, giving the reader the chance to become acquainted with work from the former Soviet Union, hitherto only available in Russian and barely available to western scientists. Keynote lectures and state-of-the-art presentations give a wide-ranging panorama of the challenges posed by SOI materials and devices, material fabrication techniques, characterization, device and circuit issues.
