Title:
Etching performance of silicon wafers with redesigned etching drum : An Approach to Etching Optimization
Personal Author:
Physical Description:
xii, 110 pages : illustrations, graphs ; 23cm.
ISBN:
9783847344179
Added Author:
Available:*
Library | Item Barcode | Call Number | Material Type | Item Category 1 | Status |
---|---|---|---|---|---|
Searching... | 33000000017761 | QC611.24 R699 2012 | Open Access Book | Book | Searching... |