Study of optical properties of silicon carbide thin film (SiC) deposited by RF magnetron sputtering

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2009

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xiii, 70 p. : ill. ; 30 cm.

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Supervisor : Assoc. Prof. Dr Bakar Ismail

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Project Paper (Sarjana Muda Sains Industri (Fizik Bahan)) - Universiti Teknologi Malaysia, 2009

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