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Cover image for MEMS/MOEMS technologies and applications III
Title:
MEMS/MOEMS technologies and applications III
Series:
Proceedings of SPIE ; v. 6836
Publication Information:
Washington : SPIE, 2008
Physical Description:
1 v. (various pagings) : ill. ; 28 cm.
ISBN:
9780819470119
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30000010215758 TK7875 M458 2008 Open Access Book Proceedings, Conference, Workshop etc.
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