Title:
Two-dimensional periodic nanoscale patterning of solid surfaces by four-beam standing wave excimer laser lithography
Personal Author:
Series:
Lasers and electro-optics research and technology
Lasers and electro-optics research and technology series
Publication Information:
New York : Nova Science Pub., 2010
Physical Description:
x, 87 p. : ill. ; 23 cm.
ISBN:
9781616686741
Subject Term:
Available:*
Library | Item Barcode | Call Number | Material Type | Item Category 1 | Status |
|---|---|---|---|---|---|
Searching... | 30000010252603 | TA1695 F55 2010 | Open Access Book | Book | Searching... |
On Order
Summary
Summary
This book presents and discusses a promising technology for fabrication of the one- and two-dimensional nanoperiodic structures on the solid surfaces by direct two- and four-beam standing wave pulsed laser modification. This method being developed extensively at present is very promising for application in nanoelectronics, data storage, integrated optics, and is considered to be a promising alternative to X-ray lithography in a wide range of applications.
Table of Contents
| Preface |
| Introduction |
| Standing Wave Pulsed Laser Modification of the Solid Surfaces: Apparatus & Basics |
| Forming the One-and Two-Dimensional Periodic Relief on the Fused Silica & Si Surfaces by Standing Wave Pulsed Laser Lithography |
| The Two-Dimensional Periodic Patterning of the Solid Surfaces by Direct Four-Beam Standing Wave Excimer Laser Modification |
| Self Assembling of the Periodic Arrays of the Nanometer Sized Semiconductor Islands Stimulated by Standing Wave UV Laser Radiation |
| Conclusion |
| Index |
