MEMS : design and fabrication

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Title:

Series:

Mechanical engineering series

The MEMS handbook

Edition:

2nd ed.

Publication Information:

Boca Raton, FL : CRC/Taylor & Francis, 2006

Physical Description:

1 v. (various pagings) : ill. ; 26 cm.

ISBN:

9780849391385

General Note:

One of three parts whose previous edition was a published as a single volume

Subject Term:

Added Author:

Library	Item Barcode	Call Number	Material Type	Item Category 1	Status
Searching... PSZ JB	30000010194387	TK7875 M455 2005	Open Access Book	Book	Searching... Unknown