Available:*
Library | Item Barcode | Call Number | Material Type | Item Category 1 | Status |
---|---|---|---|---|---|
Searching... | 30000010184478 | TJ214.5 T36 2008 | Open Access Book | Book | Searching... |
Searching... | 30000003500828 | TJ214.5 T36 2008 | Open Access Book | Book | Searching... |
On Order
Summary
Summary
Precision Motion Control focuses on enabling technologies for precision engineering - issues of direct importance to be addressed in the overall system design and realization: precision instrumentation and measurement, geometrical calibration and compensation, and motion control. It is a compilation of the most important results and publications from a major project that develops a state-of-the-art, high-speed, ultra-precision robotic system.
The second edition has been edited and rewritten throughout with the following particular areas being expanded or added: - piezoelectric actuators; - fine movement control; - gantry-stage control; - interpolation of quadrature encoder signals; - geometrical error modelling for single-, dual- and general-XY-axis stages.
By providing detailed experimental verifications of the material developed, a comprehensive and thorough treatment of the subject matter, accessible to a broad base of readers, ranging from academics to practitioners, is provided.
Table of Contents
1 Introduction | p. 1 |
1.1 Fields Requiring Precision Control | p. 1 |
1.1.1 Precision Engineering | p. 1 |
1.1.2 Micromanufacturing | p. 3 |
1.1.3 Biotechnology | p. 6 |
1.1.4 Nanotechnology | p. 7 |
1.2 Precision Machines and Tools | p. 8 |
1.3 Applications of Precision Motion Control Systems | p. 9 |
1.3.1 Semiconductor | p. 9 |
1.3.2 Magnetic and Optical Memory Manufacturing | p. 9 |
1.3.3 Optical Manufacturing | p. 9 |
1.3.4 High-resolution Imaging | p. 9 |
1.3.5 Precision Metrology | p. 10 |
1.4 Scope of the Book | p. 10 |
2 Precision Tracking Motion Control | p. 11 |
2.1 Piezoelectric Actuators | p. 11 |
2.1.1 Types of Piezoelectric Actuator Configuration | p. 11 |
2.1.2 Mathematical Model | p. 14 |
2.1.3 Adaptive Control | p. 20 |
2.2 Permanent Magnet Linear Motors (PMLM) | p. 24 |
2.2.1 Types of PMLM | p. 27 |
2.2.2 Mathematical Model | p. 30 |
2.2.3 Force Ripples | p. 31 |
2.2.4 Friction | p. 33 |
2.2.5 Composite Control | p. 34 |
2.2.6 Control Enhancement with Accelerometers | p. 44 |
2.2.7 Ripple Compensation | p. 51 |
2.2.8 Disturbance Observation and Cancellation | p. 54 |
2.2.9 Robust Adaptive Control | p. 65 |
2.2.10 Iterative Learning Control | p. 72 |
3 Automatic Tuning of Control Parameters | p. 83 |
3.1 Relay Auto-tuning | p. 84 |
3.1.1 Relay with Delay | p. 85 |
3.1.2 Two-channel Relay Tuning | p. 87 |
3.2 Friction Modelling Using Relay Feedback | p. 87 |
3.2.1 Friction Identification Method | p. 88 |
3.2.2 Simulation | p. 91 |
3.2.3 Initialisation of Adaptive Control | p. 92 |
3.3 Optimal Features Extraction from Relay Oscillations | p. 92 |
3.4 Experiments | p. 96 |
4 Co-ordinated Motion Control of Gantry Systems | p. 101 |
4.1 Co-ordinated Control Schemes | p. 103 |
4.1.1 Classical Master/Slave Approach | p. 103 |
4.1.2 Set-point Co-ordinated Control | p. 104 |
4.1.3 Fully Co-ordinated Control | p. 105 |
4.2 Simulation Study | p. 107 |
4.2.1 Control Task | p. 107 |
4.2.2 Results | p. 107 |
4.3 Experiments | p. 108 |
4.3.1 XY Table-Configuration I | p. 110 |
4.3.2 XY Table-Configuration II | p. 112 |
4.4 Adaptive Co-ordinated Control Scheme | p. 114 |
4.4.1 Dynamic Modelling of Gantry Stage | p. 116 |
4.4.2 Model-based Adaptive Control Design | p. 121 |
4.4.3 Stability Analysis | p. 123 |
4.4.4 Software Simulation | p. 123 |
4.4.5 Implementation Results | p. 125 |
5 Geometrical Error Compensation | p. 129 |
5.1 Overview of the Laser Measurement System | p. 130 |
5.2 Components of the Laser Measurement System | p. 131 |
5.2.1 Laser Head | p. 131 |
5.2.2 Interferometer and Reflector | p. 133 |
5.2.3 Measurement Receiver | p. 133 |
5.2.4 Measurement and Control Electronics | p. 134 |
5.3 Overview of Laser Calibration | p. 134 |
5.3.1 Linear Measurement | p. 135 |
5.3.2 Angular Measurement | p. 136 |
5.3.3 Straightness Measurement | p. 136 |
5.3.4 Squareness Measurement | p. 138 |
5.4 Roll Measurement Using a Level-sensitive Device | p. 139 |
5.5 Accuracy Assessment | p. 139 |
5.6 Factors Affecting Measurement Accuracy | p. 140 |
5.6.1 Linear Measurement Errors | p. 140 |
5.6.2 Angular Measurement Errors | p. 143 |
5.6.3 Straightness Measurement Errors | p. 143 |
5.6.4 Environmental Conditions | p. 143 |
5.7 Overall Error Model | p. 144 |
5.8 Look-up Table for Geometrical Errors | p. 146 |
5.9 Parametric Model for Geometrical Errors | p. 148 |
5.9.1 Error Modelling with Radial Basis Functions | p. 148 |
5.9.2 Parameter Error Approximations | p. 149 |
5.9.3 Experiments | p. 155 |
5.9.4 Error Modelling with Multi-layer Neural Networks | p. 156 |
5.10 Compensation of Machines with Random Errors | p. 161 |
5.10.1 Probabilistic Methodology | p. 162 |
5.10.2 Experiments | p. 163 |
6 Electronic Interpolation Errors | p. 171 |
6.1 Heydemann Interpolation Method | p. 172 |
6.1.1 Interpolation Bounds | p. 174 |
6.1.2 Calibration and Compensation | p. 175 |
6.2 Enhanced Interpolation Method | p. 175 |
6.2.1 Principle of Enhanced Interpolation Method | p. 176 |
6.2.2 Construction of a Look-up Table | p. 177 |
6.2.3 Experiments | p. 182 |
6.3 Parametric Model for Interpolation | p. 184 |
6.3.1 Principles of Interpolation Approach | p. 185 |
6.3.2 Precompensation Stage | p. 186 |
6.3.3 Interpolation Stage | p. 189 |
6.3.4 Experimental Study | p. 190 |
7 Vibration Monitoring and Control | p. 195 |
7.1 Mechanical Design to Minimise Vibration | p. 196 |
7.1.1 Stability and Static Determinacy of Machine Structures | p. 196 |
7.1.2 Two-dimensional Structures | p. 197 |
7.1.3 Three-dimensional Structures | p. 201 |
7.2 Adaptive Notch Filter | p. 207 |
7.2.1 Fast Fourier Transform | p. 209 |
7.2.2 Simulation | p. 209 |
7.2.3 Experiments | p. 209 |
7.3 Real-time Vibration Analyser | p. 210 |
7.3.1 Learning Mode | p. 212 |
7.3.2 Monitoring Mode | p. 214 |
7.3.3 Diagnostic Mode | p. 217 |
7.3.4 Experiments | p. 218 |
7.3.5 Remote Monitoring | p. 222 |
7.3.6 Implementation | p. 225 |
8 Other Engineering Aspects | p. 231 |
8.1 Specifications | p. 232 |
8.2 Selection of Motors and Drives | p. 232 |
8.3 Selection of Encoders | p. 232 |
8.4 Control Platform | p. 233 |
8.4.1 Hardware Architecture | p. 233 |
8.4.2 Software Development Platform | p. 236 |
8.4.3 User Interface | p. 236 |
8.5 Accuracy Assessment | p. 239 |
8.6 Digital Communication Protocols | p. 241 |
8.6.1 Fieldbus Protocol Stack | p. 242 |
8.6.2 Common Fieldbuses | p. 245 |
A Laser Calibration Optics, Accessories and Set-up | p. 253 |
References | p. 261 |
Index | p. 271 |