Plasma processing of nanomaterials

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Title:

Series:

Nanomaterials and their applications

Publication Information:

Boca Raton : CRC Press, 2012.

Physical Description:

xiii, 408 p. : ill. (some col.) ; 25 cm.

ISBN:

9781439866764

Abstract:

"Plasma technology, and its application at the nanoscale, faces new challenges in the synthesis of well-defined nanomaterials, in terms of their size, shape, and composition. With numerous examples of the synthesis of various classes of nanomaterials, this book provides a comprehensive overview of recent developments and advancements in plasma processing of nanomaterials. Combining both experimental and theoretical work, it describes the successful application of plasma processing to synthesize, modify, and process nanomaterials as well as the use of plasma processing in nanoelectronics, catalysis, energy sensors, and nanomedicine. "-- Provided by publisher.

"Preface Green computing is an emerging interdisciplinary research area spanning across the fields of computer science and engineering, electrical engineering, and other engineering disciplines. Green computing or sustainable computing is the study and practice of using computing resources efficiently, which in turn can impact a spectrum of economic, ecological, and social objectives. Such practices include the implementation of energy-efficient central processing unit processors and peripherals as well as reduced resource consumption. During the last several decades and in particular in the last five years, the area has produced a prodigious amount of knowledge that needs to be consolidated in the form of a comprehensive book. Researchers and engineers are now considering energy as a first-class resource and are inventingmeans to manage it along with performance, reliability, and security. Thus, a considerable amount of knowledge has emerged, as is evident by numerous tracks in leading conferences in a wide variety of areas such as mobile and pervasive computing, circuit design, architecture, real-time systems, and software. Active research is going on in power and thermal management at the component, software, and system level, as well as on defining power management standards for servers and devices and operating systems. Heat dissipation control is equally important, forcing circuit designers and processor architects to consider not only performance issues but also factors such as packaging, reliability, dynamic power consumption, and the distribution of heat. Thus, research growth in this area has been explosive"-- Provided by publisher.

Subject Term:

Nanostructured materials.

Plasma engineering.

Added Author:

Sankaran, Mohan.

On Order

Summary

We are at a critical evolutionary juncture in the research and development of low-temperature plasmas, which have become essential to synthesizing and processing vital nanoscale materials. More and more industries are increasingly dependent on plasma technology to develop integrated small-scale devices, but physical limits to growth, and other challenges, threaten progress.

Plasma Processing of Nanomaterials is an in-depth guide to the art and science of plasma-based chemical processes used to synthesize, process, and modify various classes of nanoscale materials such as nanoparticles, carbon nanotubes, and semiconductor nanowires. Plasma technology enables a wide range of academic and industrial applications in fields including electronics, textiles, automotives, aerospace, and biomedical. A prime example is the semiconductor industry, in which engineers revolutionized microelectronics by using plasmas to deposit and etch thin films and fabricate integrated circuits.

An overview of progress and future potential in plasma processing, this reference illustrates key experimental and theoretical aspects by presenting practical examples of:

Nanoscale etching/deposition of thin films Catalytic growth of carbon nanotubes and semiconductor nanowires Silicon nanoparticle synthesis Functionalization of carbon nanotubes Self-organized nanostructures

Significant advances are expected in nanoelectronics, photovoltaics, and other emerging fields as plasma technology is further optimized to improve the implementation of nanomaterials with well-defined size, shape, and composition. Moving away from the usual focus on wet techniques embraced in chemistry and physics, the author sheds light on pivotal breakthroughs being made by the smaller plasma community. Written for a diverse audience working in fields ranging from nanoelectronics and energy sensors to catalysis and nanomedicine, this resource will help readers improve development and application of nanomaterials in their own work.

About the Author:

R. Mohan Sankaran received the American Vacuum Society's 2011 Peter Mark Memorial Award for his outstanding contributions to tandem plasma synthesis.

Author Notes

R. Mohan Sankaran received the American Vacuum Society's 2011 Peter Mark Memorial Award for his outstanding contributions to tandem plasma synthesis.

Nathan Marchack and Jane P. ChangJohn Sporre and David N. RuzicUwe Kortshagen and Lorenzo MangoliniDavide Mariotti and R. Mohan SankaranUros Cvelbar and Mahendra K. SunkaraManish Chhowalla and H. Emrah UnalanJae Beom Park and Se Jin Kyung and Geun Young YeomRikizo Hatakeyama and Toshiaki KatoM. Meyyappan and Jeong-Soo LeeErik Neyts and Ming Mao and Maxie Eckert and Annemie BogaertsEugene Tam and Kostya (Ken) Ostrikov and Tony MurphyHorst R. Maurer and Holger KerstenYuhua Xue and Liming DaiToshiro Kaneko and Rikizo HatakeyamaAmanda Evelyn Rider and Kostya (Ken) Ostrikov

Preface	p. vii
Contributors	p. xi
1 Nanoscale Etching and Deposition	p. 1
2 Extreme Ultraviolet Light Lithography for Producing Nanofeatures in Next-Generation Semiconductor Processing	p. 35
3 Nonthermal Plasma Synthesis of Semiconductor Nanocrystals	p. 55
4 Microscale Plasmas for Metal and Metal Oxide Nanopartide Synthesis	p. 89
5 Large-Scale, Plasma-Assisted Growth of Nanowires	p. 109
6 Cathodic Arc Discharge for Synthesis of Carbon Nanoparticles	p. 147
7 Atmospheric Plasmas for Carbon Nanotubes (CNTs)	p. 165
8 Structural Control of Single-Walled Carbon Nanotubes by Plasma Chemical Vapor Deposition	p. 219
9 Graphene Growth by Plasma-Enhanced Chemical Vapor Deposition (PECVD)	p. 231
10 Modeling Aspects of Plasma-Enhanced Chemical Vapor Deposition of Carbon-Based Materials	p. 245
11 Modeling Catalytic Growth of One-Dimensional Nanostructures	p. 291
12 Diagnostics of Energy Fluxes in Dusty Plasmas	p. 309
13 Selective Functionalization and Modification of Carbon Nanomaterials by Plasma Techniques	p. 337
14 Plasma-Liquid Interactions for Fabrication of Nanobiomaterials	p. 359
15 Assembly and Self-Organization of Nanomaterials	p. 371
Index	p. 393

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Summary

Summary

Author Notes

Table of Contents