Tribology in chemical-mechanical planarization

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Boca Raton, FL : Taylor & Francis, 2005

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9780824725679

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Library	Item Barcode	Call Number	Material Type	Item Category 1	Status
Searching... PSZ JB	30000004611632	TJ1075 L49 2005	Open Access Book	Book	Searching... Unknown
Searching... SPACE Pulau Pinang Library	30000010078480	TJ1075 L49 2005	Open Access Book	Book	Searching... Unknown