Vacuum technique

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Title:

Vacuum technique

Personal Author:

Rozanov, L. N. (Leonid N.)

Publication Information:

London : Taylor & Francis, 2002

ISBN:

9780415273510

Subject Term:

Vacuum technology

Added Author:

Hablanian, M. H.

Available:*

Library	Item Barcode	Call Number	Material Type	Item Category 1	Status
Searching... PSZ JB	30000010141902	TJ940 R69 2002	Open Access Book	Book	Searching... Unknown

Vacuum technology finds itself in many areas of industry and research. These include materials handling, packaging, gas sampling, filtration, degassing of oils and metals, thin-film coating, electron microscopy, particle acceleration, and impregnation of electrical components. It is vital to design systems that are appropriate to the application, and with so many potential solutions this can become overwhelming.

Vacuum Technique provides an overview of vacuum technology, its different design methodologies, and the underlying theory. The author begins with a summary of the properties of low-pressure gases, then moves on to describe mathematical modeling of gas transfer in the vacuum system, the operation of pumps and gauges, computer-aided synthesis and analysis of systems, and the design of different vacuum systems. In particular, the author discusses the structure and characteristics of low, middle, high, and superhigh vacuum systems, as well as the characteristics of joints, materials, movement inputs, and all aspects of production technology and construction standards.

Using specific examples rather than describing the various elements, Vacuum Technique supplies engineers, technicians, researchers, and students with needed expertise and a comprehensive guide to designing, selecting, and using an appropriate vacuum system for a specific purpose.

Author Notes

L. N. Rozanov is head of the department of Information Machinery Technology at St. Petersburg Technical University.

Introduction	p. 1
I.1 The Concept of Vacuum	p. 1
I.2 History of Vacuum Engineering	p. 2
I.3 Applications of Vacuum Instruments	p. 3
Chapter 1. Properties of Gases at Low Pressures	p. 7
1.1 Gas Pressure	p. 7
1.2 Velocity Distribution of Gas Molecules	p. 12
1.3 Mean Free Path Length	p. 14
1.4 Interaction of Gas Molecules with Surfaces	p. 17
1.5 Adsorption Time	p. 19
1.6 Saturation Pressure	p. 23
1.7 Surface Coverage with Gas Molecules	p. 26
1.8 Gas Dissolution in Solids	p. 31
1.9 Electrical Phenomena	p. 34
1.10 Test Questions	p. 38
Chapter 2. Theory	p. 39
2.1 Degrees of Vacuum	p. 39
2.2 Transport Phenomena	p. 40
2.3 Thermal Equilibrium of Pressures	p. 47
2.4 Calculation of Gas Flow by the Method of Continuum Mechanics	p. 48
2.5 Calculation of Gas Flow Using the Method of Integral Angular Coefficients	p. 58
2.6 Modeling of Gas Flow	p. 63
2.7 Gas Evolution	p. 68
2.8 Basic Equation	p. 73
2.9 Test Questions	p. 76
Chapter 3. Measurement of Vacuum	p. 79
3.1 Classification of Measurement Methods	p. 79
3.2 Mechanical Methods	p. 82
3.3 Thermal Methods	p. 87
3.4 Electrical Methods of Total Pressure Measurement	p. 90
3.5 Electrical Methods of Measuring Partial Pressure	p. 99
3.6 Sorption Methods	p. 109
3.7 Calibration of Transducers	p. 112
3.8 Measurement of Gas Flows	p. 116
3.9 Leak Detection Methods	p. 120
3.10 Test Questions	p. 127
Chapter 4. Mechanical Methods of Vacuum Production	p. 129
4.1 General Characteristic of Vacuum Pumps	p. 129
4.2 Volume Pumping	p. 131
4.3 Design of Displacement Pumps	p. 136
4.4 Molecular Pumping	p. 144
4.5 Design of Molecular Pumps	p. 149
4.6 Vapor Jet Pumping	p. 151
4.7 Working Liquids	p. 158
4.8 Design of Vapor Jet Pumps	p. 160
4.9 Traps	p. 160
4.10 Test Questions	p. 165
Chapter 5. Physico-Chemical Methods of Vacuum Production	p. 167
5.1 General	p. 167
5.2 Ion Pumping	p. 167
5.3 Chemisorption Pumping	p. 169
5.4 Evaporation Pumps	p. 172
5.5 Cryocondensation Pumping	p. 173
5.6 Cryoadsorption Pumping	p. 176
5.7 Cryogenic Pumps	p. 181
5.8 Getter-Ion Pumping	p. 183
5.9 Getter-Ion Pumps	p. 185
5.10 Test Questions	p. 188
Chapter 6. Analysis of the Vacuum Systems	p. 189
6.1 Typical Vacuum Systems	p. 189
6.2 Calculation of Gas Load	p. 199
6.3 Equations of Steady-State Pumping	p. 201
6.4 Connections of System Elements and Pumped Objects	p. 204
6.5 Connection of Pumps	p. 209
6.6 Time of Pumping	p. 216
6.7 Cost of Pumping	p. 222
6.8 Verifying Calculation of a Vacuum System	p. 225
6.9 An Example of Verifying Calculation	p. 230
6.10 Test Questions	p. 232
Chapter 7. Design of Vacuum Systems	p. 233
7.1 Database of Vacuum System Elements	p. 233
7.2 Structural Design of Vacuum Systems Using the Method of Selecting Variants	p. 234
7.3 Structural Design Using Typical Pattern	p. 238
7.4 Parametric Design of a Vacuum System Using the Utilization Coefficient of Vacuum Pump	p. 239
7.5 Multiparametric Design of a Vacuum System	p. 242
7.6 Schematic Connections and Assembly	p. 245
7.7 Projecting Calculation of a Vacuum System	p. 247
7.8 Example of Projecting Calculation of a Vacuum System in Steady-State Mode	p. 251
7.9 Test Questions	p. 260
Chapter 8. Construction of Vacuum Systems	p. 263
8.1 Materials of Vacuum Engineering	p. 263
8.2 Non-Detachable Connections	p. 267
8.3 Detachable Vacuum Connections	p. 274
8.4 Vacuum Pipelines	p. 280
8.5 Devices for Transmitting Movement to Vacuum	p. 282
8.6 Electrical Vacuum Contacts	p. 287
8.7 Vacuum Valves	p. 289
8.8 Test Questions	p. 294
Chapter 9. Problems	p. 295
9.1 Properties of Gases at Low Temperatures	p. 295
9.2 Theory of Vacuum Engineering	p. 296
9.3 Calculation of Vacuum Systems	p. 298
Reference Tables	p. 299
Appendix	p. 311
A.1 Derivation of the Maxwell-Boltzmann Function (Velocity Distribution of Gas Molecules)	p. 311
A.2 Average Velocity	p. 314
A.3 The Equation of Polymolecular Adsorption	p. 314
A.4 The Equation of Gas Flow Through an Aperture in Viscous Flow Mode	p. 317
References	p. 345
Index	p. 347

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Author Notes

Table of Contents