Title:
Low-temperature PECVD of nanodevice-grade nc-3C-SiC
Personal Author:
General Note:
Chem. Vap. Deposition, Vol. 13 : 561-566. 2007
Available:*
Library | Item Barcode | Call Number | Material Type | Item Category 1 | Status |
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Searching... | 30000010238009 | MAK 17828 | Open Access Book | Index and Abstract | Searching... |